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Improvement in accuracy of micro-dimple arrays prepared by micro-electrochemical machining with high-pressure hydrostatic electrolyte

  • Yongqiang Pan
  • Zhibao Hou
  • Ningsong QuEmail author
ORIGINAL ARTICLE
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Abstract

Micro-dimple arrays, as a common surface texture, play an important role in improving the tribological properties and lifetimes of mechanical parts. Through-mask electrochemical micromachining (TMEMM) is an important and popular approach for fabricating micro-dimple arrays. In traditional TMEMM that uses polydimethylsiloxane (PDMS) as a mask, the accumulation and escape of the oxygen bubbles generated on each micro-dimple vary considerably, which decreases the uniformity of the electrical field and leads to poor dimensional uniformity (including diameter and depth) of the micro-dimple arrays. In this paper, high-pressure hydrostatic electrolyte was proposed in order to enhance the uniformity of the electrical field distribution on the workpiece surface. Both the dimensions and machining accuracy of micro-dimple arrays under different applied direct current (DC) voltages during high-pressure hydrostatic TMEMM were investigated experimentally. Two novel phenomena were observed: (i) the dimensions of the micro-dimple arrays were greater at low voltages than at high voltages, and (ii) the machining accuracy was high at both low and high applied voltages but was low at intermediate voltages. At 32 V DC, an array of 14,000 micro-dimples was successfully fabricated with a diameter and a depth of 105.95 and 9.79 μm, respectively, and with diameter and depth deviations of 0.59 μm and 0.21 μm, respectively.

Keywords

Micro-dimple arrays PDMS mask Through-mask electrochemical micromachining High-pressure hydrostatic Machining accuracy DC voltage 

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Notes

Funding information

The work described in this study was supported by the National Basic Research Program of China (973 Program, Grant 2015CB057502) and the Fundamental Research Funds for the Central Universities (Grant NZ2016106).

References

  1. 1.
    Shen XH, Tao GC (2015) Tribological behaviors of two micro textured surfaces generated by vibrating milling under boundary lubricated sliding. Int J Adv Manuf Technol 79(9–12):1995–2002CrossRefGoogle Scholar
  2. 2.
    Piasecka M (2014) Laser texturing, spark erosion and sanding of the surfaces and their practical applications in heat exchange devices. Adv Mater Res 874:95–100CrossRefGoogle Scholar
  3. 3.
    Grewal HS, Pendyala P, Shin H, Cho IJ, Yoon ES (2017) Nanotribological behavior of bioinspired textured surfaces with directional characteristics. Wear 384:151–158CrossRefGoogle Scholar
  4. 4.
    Hughes-Brittain NF, Qiu L, Picot OT, Wang W, Peijs T, Bastiaansen CWM (2017) Surface texturing of electrospun fibres by photoembossing using pulsed laser interference holography and its effects on endothelial cell adhesion. Polym 125:40–49CrossRefGoogle Scholar
  5. 5.
    Dinca V, Alloncle P, Delaporte P, Ion V, Rusen L, Filipescu M, Mustaciosu C, Luculescu C, Dinescu M (2015) Excimer laser texturing of natural composite polymer surfaces for studying cell-to-substrate specific response. Appl Surf Sci 352:82–90CrossRefGoogle Scholar
  6. 6.
    Xu YF, Peng YB, Dearn KD, You T, Geng J, Hu XG (2017) Fabrication and tribological characterization of laser textured boron cast iron surfaces. Surf Coat Technol 313:391–401CrossRefGoogle Scholar
  7. 7.
    Saito Y, Yabu H (2015) Bio-inspired low frictional surfaces having micro-dimple arrays prepared with honeycomb patterned porous films as wet etching masks. Langmuir 31(3):959–963CrossRefGoogle Scholar
  8. 8.
    Chen XL, Qu NS, Hou ZB, Wang XL, Zhu D (2017) Friction reduction of chrome-coated surface with micro-dimple arrays generated by electrochemical micromachining. J Mater Eng Perform 26(2):667–675CrossRefGoogle Scholar
  9. 9.
    Wan DP, Liu HB, Wang YM, Hu DJ, Gui ZX (2008) CO2 laser beam modulating for surface texturing machining. Opt Laser Technol 40(2):309–314CrossRefGoogle Scholar
  10. 10.
    Su X, Shi LP, Huang W, Wang XL (2016) A multi-phase micro-abrasive jet machining technique for the surface texturing of mechanical seals. Int J Adv Manuf Technol 86(5–8):2047–2054CrossRefGoogle Scholar
  11. 11.
    Liew PJ, Shimada K, Mizutani M, Yan J, Kuriyagawa T (2013) Fabrication of microstructures on RB-SiC by ultrasonic cavitation assisted micro-electrical discharge machining. Int J Autom Technol 7:621–621CrossRefGoogle Scholar
  12. 12.
    Wang MH, Bao ZY, Qiu GZ, Xu XF (2017) Fabrication of micro-dimple arrays by AS-EMM and EMM. Int J Adv Manuf Technol 93(1–4):787–797CrossRefGoogle Scholar
  13. 13.
    Ghoshal B, Bhattacharyya B (2014) Shape control in micro borehole generation by EMM with the assistance of vibration of tool. Precis Eng 38(1):127–137CrossRefGoogle Scholar
  14. 14.
    Liu WD, Ao SS, Li Y, Liu ZM, Zhang H, Luo Z, Yu HL (2016) Investigation on the profile of microhole generated by electrochemical micromachining using retracted tip tool. Int J Adv Manuf Technol 87(1–4):877–889CrossRefGoogle Scholar
  15. 15.
    Yuan Y, Han LH, Zhang J, Jia JC, Zhao XS, Cao YZ, Hu ZJ, Yan YD, Dong S, Tian ZQ, Tian ZW, Zhan DP (2013) Electrochemical mechanical micromachining based on confined etchant layer technique. Faraday Discuss 164:189–197CrossRefGoogle Scholar
  16. 16.
    Byun JW, Shin HS, Kwon MH, Kim BH, Chu CN (2010) Surface texturing by micro ECM for friction reduction. Int J Precis Eng Manuf 11(5):747–753CrossRefGoogle Scholar
  17. 17.
    Walker JC, Kamps TJ, Lam JW, Mitchell-Smith J, Clare AT (2017) Tribological behaviour of an electrochemical jet machined textured Al-Si automotive cylinder liner material. Wear 376:1611–1621CrossRefGoogle Scholar
  18. 18.
    Shenoy RV, Datta M, Romankiw LT (1996) Investigation of island formation during through-mask electrochemical micromachining. J Electrochem Soc 143(7):2305–2309CrossRefGoogle Scholar
  19. 19.
    Datta M (1998) Microfabrication by electrochemical metal removal. IBM J Res Dev 42:655–669CrossRefGoogle Scholar
  20. 20.
    Datta M, Landolt D (2000) Fundamental aspects and applications of electrochemical microfabrication. Electrochim Acta 45(15–16):2535–2558CrossRefGoogle Scholar
  21. 21.
    Madore C, Landolt D (1997) Electrochemical micromachining of controlled topographies on titanium for biological applications. J Micromech Microeng 7(4):270–275CrossRefGoogle Scholar
  22. 22.
    Wang L, Wang QD, Hao XQ, Ding YC, Lu BH (2010) Finite element simulation and experimental study on the through-mask electrochemical micromachining (EMM) process. Int J Adv Manuf Technol 51(1–4):155–162Google Scholar
  23. 23.
    Chauvy PF, Hoffmann P, Landolt D (2003) Applications of laser lithography on oxide film to titanium micromachining. Appl Surf Sci 208:165–170CrossRefGoogle Scholar
  24. 24.
    Li DL, Zhu D, Li HS (2011) Microstructure of electrochemical micromachining using inert metal mask. Int J Adv Manuf Technol 55(1–4):189–194CrossRefGoogle Scholar
  25. 25.
    Qu NS, Chen XL, Li HS, Zeng YB (2014) Electrochemical micromachining of micro-dimple arrays on cylindrical inner surfaces using a dry-film photoresist. Chin J Aeronaut 27(4):1030–1036CrossRefGoogle Scholar
  26. 26.
    Zhu D, Qu NS, Li HS, Zeng YB, Li DL, Qian SQ (2009) Electrochemical micromachining of microstructures of micro hole and dimple array. CIRP Ann Manuf Technol 58(1):177–180CrossRefGoogle Scholar
  27. 27.
    Qian SQ, Zhu D, Qu NS, Li HS, Yan DS (2010) Generating micro-dimples array on the hard chrome-coated surface by modified through mask electrochemical micromachining. Int J Adv Manuf Technol 47(9–12):1121–1127CrossRefGoogle Scholar
  28. 28.
    Qu NS, Chen XL, Li HS, Zhu D (2014) Fabrication of PDMS micro through-holes for electrochemical micromachining. Int J Adv Manuf Technol 72(1–4):487–494CrossRefGoogle Scholar
  29. 29.
    Yu HW, Huang W, Wang XL (2013) Dimple patterns design for different circumstances. Lubr Sci 25(2):67–78CrossRefGoogle Scholar
  30. 30.
    Chen XL, Qu NS, Li HS (2015) Improvement of dimensional uniformity on micro-dimple arrays generated by electrochemical micro-machining with an auxiliary electrode. Int J Adv Manuf Technol 80(9–12):1577–1585CrossRefGoogle Scholar
  31. 31.
    Zhang XF, Qu NS, Li HS, Xu ZY (2015) Investigation of machining accuracy of micro-dimples fabricated by modified microscale pattern transfer without photolithography of substrates. Int J Adv Manuf Technol 81(9–12):1475–1485CrossRefGoogle Scholar
  32. 32.
    Zhang XF, Qu NS, Chen XL (2016) Sandwich-like electrochemical micromachining of micro-dimples. Surf Coat Technol 302:438–447CrossRefGoogle Scholar
  33. 33.
    Chen XL, Qu NS, Fang XL, Zhu D (2015) Reduction of undercutting in electrochemical micro-machining of micro-dimple arrays by utilizing oxygen produced at the anode. Surf Coat Technol 277:44–51CrossRefGoogle Scholar
  34. 34.
    Chen XL, Qu NS, Li HS, Zhu D (2014) The fabrication and application of a PDMS micro through-holes mask in electrochemical micromanufacturing. Adv Mech Eng 126–133Google Scholar
  35. 35.
    Chen XL, Qu NS, Li HS, Xu ZY (2016) Electrochemical micromachining of micro-dimple arrays using a polydimethylsiloxane (PDMS) mask. J Mater Process Technol 229:102–110CrossRefGoogle Scholar
  36. 36.
    Qian SQ, Ji F, Qu NS, Li HS (2014) Improving the localization of surface texture by electrochemical machining with auxiliary anode. Mater Manuf Process 29(11–12):1488–1493CrossRefGoogle Scholar

Copyright information

© Springer-Verlag London Ltd., part of Springer Nature 2018

Authors and Affiliations

  1. 1.College of Mechanical and Electrical EngineeringNanjing University of Aeronautics and AstronauticsNanjingChina
  2. 2.Shanghai Aerospace Control Technology InstituteShanghaiChina
  3. 3.Jiangsu Key Laboratory of Precision and Micro-Manufacturing TechnologyNanjingChina

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