An efficient one-step lookahead A* algorithm for PM-CT scheduling problems
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In this paper, we present an improved one-step lookahead A* algorithm for the scheduling problem for parallel-mode cluster tools, where n wafer types are simultaneously processed on a cluster tool with m chambers. Specifically, we suggest a refined cost function, priority-based node selection, N-chamber cycle detection to identify deadlock situations, and a one-step lookahead method to reduce the number of unsafe states generated. Using numerical experiments, we show that the proposed algorithm leads to a significant reduction in the number of explored states and execution time necessary to find an optimal solution.
KeywordsA* algorithm Deadlock-free scheduling Parallel-mode cluster tools Petri net model Semiconductor manufacturing
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