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Development of the precision planar motor stage using a new magnet array and robust control with the parametric uncertainty model

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Abstract

This paper discusses the development of a new precision motor stage, where a new magnet array is proposed and a new robust controller is implemented. Several planar motor parameters, such as the air gap flux density and flux linkage, are analytically evaluated by the scalar potential, and, thus, about a 5–8% increase is observed for the proposed magnet array. A new robust controller is also proposed using the parametric uncertainty model, which can effectively control the movement during both stable and cogging positions. The performance of the robust controller is evaluated, and it shows much higher robustness and about a 200% higher position accuracy when compared with the conventional PID controller. Therefore, the developed planar motor stage is successfully designed and implemented, and, thus, proposes great potential for most of the positioning applications in the field of semiconductor equipment and machine tools.

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Author information

Correspondence to Heui-Jae Pahk.

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Shin, H., Pahk, H. Development of the precision planar motor stage using a new magnet array and robust control with the parametric uncertainty model . Int J Adv Manuf Technol 33, 643–651 (2007). https://doi.org/10.1007/s00170-006-0514-6

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Keywords

  • Magnet array
  • Planar motor
  • Robust control
  • Parametric uncertainty model