One of the most essential parameters in the investigation of singularities in molecule interaction with the surface of a solid is the energy accommodation coefficient. Data on the positive ion accommodation coefficients in the energy range ∼ 1–100 eV are scarce , hence the value of αi is often taken close to one, although this condition is not satisfied in practice for the majority of working gases. In this paper we discuss the resultant measurements of the value of αi in a high-speed flow of rarified plasma.
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Shuvalov, V.A. Influence of the atomic weight of the target on the magnitude of the energy accommodation coefficient of ions of a partially ionized gas flow. J Appl Mech Tech Phys 20, 325–328 (1979). https://doi.org/10.1007/BF00911688
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