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Sputtering of Cu and Zn atoms from elemental and alloy targets

Abstract

The energy distributions of Cu and Zn atoms sputtered from elements and CuxZn1-x alloys (x=0.80, 0.24) with a 6 keV Ar+ beam have been measured. It was found that the collision-cascade theory properly described the flux of sputtered atoms. From the spectra the binding energies of Cu and Zn atoms in the elemental and alloy surfaces were determined. The collision-cascade theory and the experimentally adjusted values of the binding energies allowed for calculation of the total and partial sputtering yields, and the equilibrium surface composition of the ion bombarded alloys.

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This work was carried out as a part of Research Project M.R. I/5.

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Szymoński, M. Sputtering of Cu and Zn atoms from elemental and alloy targets. Appl. Phys. 23, 89–92 (1980). https://doi.org/10.1007/BF00899575

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PACS

  • 79.20