The existence of an amorphous phase consisting of palladium and silicon compounds, was detected in the transition zone of palladium-silicon contacts.
The existence of an amorphous phase in the transition zone has a considerable effect on the volt-ampere characteristics (causes a nonlinearity of the VAC) and on the resistance of ohmic contacts.
Improvement of VAC of palladium-silicon contacts after their annealing to 400–500‡C can be explained, first, by a crystallization of the amorphous phase of palladium-silicon compounds; secondly, by the formation in the transition zone of polycrystalline palladium suicides (PdSi and Pd2Si).
For improving the volt-ampere characteristics of palladium film contacts with silicon, their treatment in the temperature range 400–500‡C for 30 min can be recommended.
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Dudko, G.V., Pilipenko, A.G. & Tarakanov, V.I. Structure of films and phase transformations in the palladium-silicon contact zone. Soviet Physics Journal 17, 604–607 (1974). https://doi.org/10.1007/BF00894786
- Phase Transformation
- Transition Zone