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Sputtered-atom energy relaxation in a plasma


The Monte Carlo method has been used to examine the migration of sputtered atoms, whose transport may be described by a diffusion equation. The position of the virtual source in the plasma is determined. The energy relaxation has also been examined by experiment. The theoretical and experimental results are in agreement.

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Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 10, pp. 3–8, October, 1982.

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Zhiglinskii, A.G., Izmailov, A.M., Kuchinskii, V.V. et al. Sputtered-atom energy relaxation in a plasma. Soviet Physics Journal 25, 869–873 (1982).

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  • Migration
  • Monte Carlo Method
  • Diffusion Equation
  • Energy Relaxation
  • Virtual Source