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Atomic mixing in ion probe microanalysis

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The atomic mixing due to a knock-on cascade has much influence on the depth resolution of ion probe microanalysis. The preliminary experimental results support the assumption that the depth resolution due to this effect is determined by the competition of sputtering rate and creation rate of atomic displacement.

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Ishitani, T., Shimizu, R. & Tamura, H. Atomic mixing in ion probe microanalysis. Appl. Phys. 6, 277–279 (1975).

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Index Headings

  • Surface analysis
  • SIMS