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Vacuum breakdown of silicon monoxide thin-film capacitors

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Translated from Izvestiya Vysshikh Uchebnykh Zavedenii Fizika, No. 6, pp. 129–132, June, 1970.

The authors thank senior engineer V. P. Sorokin for assistance in the experiments.

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Rudnev, A.N., Motoshkin, V.V. & Tarkhanov, A.A. Vacuum breakdown of silicon monoxide thin-film capacitors. Soviet Physics Journal 13, 801–804 (1970). https://doi.org/10.1007/BF00836711

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Keywords

  • Silicon
  • Silicon Monoxide
  • Vacuum Breakdown