Journal of Materials Science

, Volume 14, Issue 10, pp 2325–2334 | Cite as

Fluoride accelerated nitridation of silicon

  • D. Campos-Loriz
  • S. P. Howlett
  • F. L. Riley
  • F. Yusaf


Fully characterized silicon powder has been nitrided alone, and in the presence of small amounts of aluminium, calcium and sodium fluorides. Comparisons of the overall extents of reaction, and individualα- andβ-silicon nitride phase yields, have been made. It is concluded that the principal action of these fluorides is the disruption of the native silica film on the silicon surfaces, thereby increasing the active site density at which nitridation can occur. The nitridation kinetics are shown to be consistent with a “mutually blocking pore” model.


Silicon Nitride Silicon Surface Silica Film Calcium Fluoride Silicon Powder 


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Copyright information

© Chapman and Hall Ltd. 1979

Authors and Affiliations

  • D. Campos-Loriz
    • 1
  • S. P. Howlett
    • 1
  • F. L. Riley
    • 1
  • F. Yusaf
    • 1
  1. 1.Department of CeramicsUniversity of Leeds, Houldsworth School of Applied ScienceLeedsUK

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