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The effects of thermal diffusion of nitrogen gas on silicon nitridation rate

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    J. A. MANGELS,Amer. Ceram. Soc. Bull. 60 (1981) 613.

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    H. KIM and C. H. KIM,J. Mater. Sci. Lett. 3 (1984) 199.

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Kim, H., Kim, C.H. The effects of thermal diffusion of nitrogen gas on silicon nitridation rate. J Mater Sci Lett 3, 203–204 (1984). https://doi.org/10.1007/BF00726793

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Keywords

  • Nitrogen
  • Polymer
  • Silicon
  • Thermal Diffusion
  • Silicon Nitridation