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Oxidation of silicon in RF induced oxygen plasma

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Sharma, S.K., Chakravarty, B.C., Singh, S.N. et al. Oxidation of silicon in RF induced oxygen plasma. J Mater Sci Lett 9, 982–984 (1990). https://doi.org/10.1007/BF00722196

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Keywords

  • Oxidation
  • Oxygen
  • Polymer
  • Silicon
  • Oxygen Plasma