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Spectroellipsometric measurement of refractive index and thickness for HfO2 films on optical glass

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Translated from Zhurnal Prikladnoi Spektroskopii, Vol. 56, Nos. 5–6, pp. 827–830, May–June, 1992.

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Odarich, V.A., Panasyuk, V.I. & Stashchuk, V.S. Spectroellipsometric measurement of refractive index and thickness for HfO2 films on optical glass. J Appl Spectrosc 56, 510–512 (1992). https://doi.org/10.1007/BF00661757

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Keywords

  • Optical Glass
  • Brewster Angle
  • HfO2 Film
  • Film Parameter
  • Ellipsometric Angle