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Journal of Materials Science

, Volume 28, Issue 7, pp 1919–1936 | Cite as

Some factors influencing the formation of reaction-bonded silicon nitride

  • R. G. Pigeon
  • A. Varma
  • A. E. Miller
Papers

Abstract

Several salient factors influencing the formation of reaction-bonded silicon nitride (RBSN) compacts have been studied. These include the effects of mullite and alumina furnace tubes typically employed during “high-purity” nitridation studies, pre-sintering of green silicon compacts, free powder versus compact nitridation, and the influence of metal/metal oxide additions. The latter studies have provided experimental evidence for enhancement due to dissociated nitrogen, and suggest that (1) β-Si3N4 formation does not necessarily require a liquid phase, (2) atomic nitrogen stimulates β-phase formation, and (3) the liquid phase provides an efficient source for volatile silicon, promoting α-Si3N4. These conclusions are consistent with accepted mechanisms for the formation of the two phases.

Keywords

Silicon Furnace Liquid Phase Nitride Atomic Nitrogen 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Chapman & Hall 1993

Authors and Affiliations

  • R. G. Pigeon
    • 1
  • A. Varma
    • 1
  • A. E. Miller
    • 2
  1. 1.Department of Chemical EngineeringUniversity of Notre DameNotre DameUSA
  2. 2.Department of Electrical EngineeringUniversity of Notre DameNotre DameUSA

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