CO2 laser deposition of diamond thin films on electronic materials
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Laser-induced pyrolysis has been utilized to create gas-surface chemical reactions necessary for diamond deposition on electronic materials. A 1200 W CO2 gas laser has been used as an energy source for depositing diamond thin films from a gas mixture of CH4 and H2 in a chemical vapour deposition chamber. The substrate temperature was about 500°C. The laser beam energy was largely absorbed by the gases that lead to their excitation and decomposition on contact with the nearby hot substrate. Raman spectroscopy and scanning electron microscope analysis revealed high quality, fine crystalline diamond structures.
KeywordsPyrolysis Raman Spectroscopy Chemical Vapour Deposition Substrate Temperature Scanning Electron Microscope Analysis
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