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Journal of Materials Science

, Volume 28, Issue 7, pp 1733–1737 | Cite as

CO2 laser deposition of diamond thin films on electronic materials

  • P. A. Molian
  • A. Waschek
Papers

Abstract

Laser-induced pyrolysis has been utilized to create gas-surface chemical reactions necessary for diamond deposition on electronic materials. A 1200 W CO2 gas laser has been used as an energy source for depositing diamond thin films from a gas mixture of CH4 and H2 in a chemical vapour deposition chamber. The substrate temperature was about 500°C. The laser beam energy was largely absorbed by the gases that lead to their excitation and decomposition on contact with the nearby hot substrate. Raman spectroscopy and scanning electron microscope analysis revealed high quality, fine crystalline diamond structures.

Keywords

Pyrolysis Raman Spectroscopy Chemical Vapour Deposition Substrate Temperature Scanning Electron Microscope Analysis 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

  1. 1.
    P. K. Bachmann andR. Messier,“Emerging technology of diamond thin films,”Chem. Engng News (1989) 24–39.Google Scholar
  2. 2.
    D. Bauerle, “Chemical processing with lasers” (Springer-Verlag, New York, 1986).CrossRefGoogle Scholar
  3. 3.
    K. Kitahama, K. Hirata, S. Kawia, N. Fujimori, T. Yoshino andA. Dio, “Synthesis of diamond by laser-induced chemical vapor deposition”,Appl. Phys. Lett. 49 (1986) 634–635.CrossRefGoogle Scholar
  4. 4.
    Y. Goto, T. Yagi andH. Nagai, “Synthesis of diamond films by laser-induced chemical vapor deposition”,Mater. Res. Soc. Proc. 129 (1989) 213–217.CrossRefGoogle Scholar
  5. 5.
    G. Tyndall andN. Hacker, “KrF-excimer laser induced CVD of diamond”, Presented at Materials Research Society Meeting in Boston, November, 1990.Google Scholar
  6. 6.
    H. Okabe, “Photochemistry of small molecules” (John Wiley, 1978).Google Scholar
  7. 7.
    L. H. Little, “Infrared spectra of adsorbed species” (Academic Press, 1966).Google Scholar
  8. 8.
    M. Kawai, “CO2 laser induced surface reaction”, in “Photochemistry on solid surfaces”, edited by M. Anpo and T. Matsuura (Elsevier, 1989) pp. 329–338.Google Scholar

Copyright information

© Chapman & Hall 1993

Authors and Affiliations

  • P. A. Molian
    • 1
  • A. Waschek
    • 2
  1. 1.Iowa State UniversityAmesUSA
  2. 2.Iowa Laser Technology IncCedar FallsUSA

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