Properties of rapidly deposited amorphous hydrogenated carbon films
- 26 Downloads
The properties of hydrogenated amorphous carbon films prepared by the rapid and low-temperature decomposition of toluene in an r.f. glow discharge have been investigated. The films are composed of a mixture of sp2 and sp3 bonded carbons. Measurements of the optical gap show that the optical gap decreases with an increase of the r.f. power and increases with increasing pressure. The room-temperature dielectric constant decreases with increasing pressure with a dielectric loss tangent of 1%.
KeywordsPolymer Toluene Dielectric Constant Dielectric Loss Glow Discharge
Unable to display preview. Download preview PDF.