Advertisement

Journal of Materials Science

, Volume 27, Issue 23, pp 6437–6439 | Cite as

Properties of rapidly deposited amorphous hydrogenated carbon films

  • Yoshikazu Nakamura
  • Yoshimasa Yamaguchi
  • Yoshihisa Watanabe
  • Shigekazu Hirayama
Papers

Abstract

The properties of hydrogenated amorphous carbon films prepared by the rapid and low-temperature decomposition of toluene in an r.f. glow discharge have been investigated. The films are composed of a mixture of sp2 and sp3 bonded carbons. Measurements of the optical gap show that the optical gap decreases with an increase of the r.f. power and increases with increasing pressure. The room-temperature dielectric constant decreases with increasing pressure with a dielectric loss tangent of 1%.

Keywords

Polymer Toluene Dielectric Constant Dielectric Loss Glow Discharge 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. 1.
    H. Dimigen, H. Hubsch andR. Memming,Appl. Phys. Lett. 50 (1987) 1056.CrossRefGoogle Scholar
  2. 2.
    D. A. Anderson,Phil. Mag. 35 (1977) 17.CrossRefGoogle Scholar
  3. 3.
    A. Bubenzer, B. Dischler, G. Brant andP. Koidl,J. Appl. Phys. 54 (1983) 4590.CrossRefGoogle Scholar
  4. 4.
    K. Fabrisiak, S. Orzeszko, F. Rozploch andJ. Szatkowski,J. Non-Cryst. Solids 99 (1986) 12.CrossRefGoogle Scholar
  5. 5.
    A. Grill, V. Patel andB. S. Meyerson,J. Mater. Res. 5 (1990) 2531.CrossRefGoogle Scholar
  6. 6.
    R. R. Nimmagadda, A. Joshi andW. L. Hsu,J. Mater. Res. 5 (1990) 2445.CrossRefGoogle Scholar
  7. 7.
    D. R. McKenzie, R. C. McPhedran, N. Savvides andL. C. Botten,Phil. Mag. B48 (1983) 341.CrossRefGoogle Scholar
  8. 8.
    M. Ramsteiner andJ. Wagner,Appl. Phys. Lett. 5 (1987) 1355.CrossRefGoogle Scholar
  9. 9.
    M. Yoshikawa, G. Katagiri, H. Ishida andA. Ishitani,J. Appl. Phys. 64 (1989) 6464.CrossRefGoogle Scholar
  10. 10.
    B. Dischler, A. Bubenzer andP. Koidl,Appl. Phys. Lett. 42 (1983) 636.CrossRefGoogle Scholar

Copyright information

© Chapman & Hall 1992

Authors and Affiliations

  • Yoshikazu Nakamura
    • 1
  • Yoshimasa Yamaguchi
    • 1
  • Yoshihisa Watanabe
    • 1
  • Shigekazu Hirayama
    • 1
  1. 1.Department of Materials Science and EngineeringNational Defense AcademyKanagawaJapan

Personalised recommendations