Journal of Materials Science

, Volume 27, Issue 23, pp 6437–6439 | Cite as

Properties of rapidly deposited amorphous hydrogenated carbon films

  • Yoshikazu Nakamura
  • Yoshimasa Yamaguchi
  • Yoshihisa Watanabe
  • Shigekazu Hirayama


The properties of hydrogenated amorphous carbon films prepared by the rapid and low-temperature decomposition of toluene in an r.f. glow discharge have been investigated. The films are composed of a mixture of sp2 and sp3 bonded carbons. Measurements of the optical gap show that the optical gap decreases with an increase of the r.f. power and increases with increasing pressure. The room-temperature dielectric constant decreases with increasing pressure with a dielectric loss tangent of 1%.


Polymer Toluene Dielectric Constant Dielectric Loss Glow Discharge 
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Copyright information

© Chapman & Hall 1992

Authors and Affiliations

  • Yoshikazu Nakamura
    • 1
  • Yoshimasa Yamaguchi
    • 1
  • Yoshihisa Watanabe
    • 1
  • Shigekazu Hirayama
    • 1
  1. 1.Department of Materials Science and EngineeringNational Defense AcademyKanagawaJapan

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