Journal of Materials Science

, Volume 26, Issue 13, pp 3585–3592 | Cite as

Phase transformations in TiO2/SiO2 sol-gel films as a function of composition and heat-treatment

  • S. M. Melpolder
  • A. W. West
  • C. L. Barnes
  • T. N. Blanton


The refractive indices of titania/silica sol-gel films are known to vary over a wide range with composition. However, little work has been done to investigate the possible variations in refractive index that can be produced for one specific sol-gel composition by varying the heat-treatment time and temperature. In this study, three different titania/silica sol-gel compositions containing 40, 60 and 80 mol% titania were studied after thermal processing at temperatures from 175–1050°C for variable lengths of time. The refractive indices and thicknesses of the sol-gel films spin-coated on to silicon wafers were determined using a combined technique of ellipsometry and reflectance spectroscopy. The microstructural differences in the films were investigated using X-ray diffraction and transmission electron microscopy techniques.


Polymer Silicon Titania Transmission Electron Microscopy Refractive Index 
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Copyright information

© Chapman and Hall Ltd. 1991

Authors and Affiliations

  • S. M. Melpolder
    • 1
  • A. W. West
    • 1
  • C. L. Barnes
    • 1
  • T. N. Blanton
    • 1
  1. 1.Manufacturing Research and Engineering OrganizationEastman Kodak CompanyRochesterUSA

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