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Journal of Materials Science

, Volume 26, Issue 13, pp 3585–3592 | Cite as

Phase transformations in TiO2/SiO2 sol-gel films as a function of composition and heat-treatment

  • S. M. Melpolder
  • A. W. West
  • C. L. Barnes
  • T. N. Blanton
Papers

Abstract

The refractive indices of titania/silica sol-gel films are known to vary over a wide range with composition. However, little work has been done to investigate the possible variations in refractive index that can be produced for one specific sol-gel composition by varying the heat-treatment time and temperature. In this study, three different titania/silica sol-gel compositions containing 40, 60 and 80 mol% titania were studied after thermal processing at temperatures from 175–1050°C for variable lengths of time. The refractive indices and thicknesses of the sol-gel films spin-coated on to silicon wafers were determined using a combined technique of ellipsometry and reflectance spectroscopy. The microstructural differences in the films were investigated using X-ray diffraction and transmission electron microscopy techniques.

Keywords

Polymer Silicon Titania Transmission Electron Microscopy Refractive Index 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Chapman and Hall Ltd. 1991

Authors and Affiliations

  • S. M. Melpolder
    • 1
  • A. W. West
    • 1
  • C. L. Barnes
    • 1
  • T. N. Blanton
    • 1
  1. 1.Manufacturing Research and Engineering OrganizationEastman Kodak CompanyRochesterUSA

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