Advertisement

Journal of Materials Science

, Volume 26, Issue 6, pp 1505–1511 | Cite as

Friction and wear of single-crystal silicon at elevated temperatures

  • D. -S. Park
  • S. Danyluk
  • M. J. McNallan
Papers

Abstract

Single-crystal silicon wafers ((1 1 1) and (1 0 0)p-type) were abraded at room temperature 300 °C, and 600 °C by a polycrystalline partially stabilized zirconia ball in a ball-on reciprocating flat geometry. The sliding direction was 〈1 1 0〉. The friction coefficient was recorded as a function of reciprocating strokes and the deformation mode of the silicon. The friction coefficient at room temperature decreased with the number of strokes, and this variation was less affected by the number of strokes at the higher temperatures. The wear track width and depth were measured at the three temperatures. Wear increases as the temperature is raised to 300 and 600 °C. Optical and scanning electron microscopy of the subsurface damage reveals that cracks are generated at RT and 300 °C and dislocations are produced at 600 °C. The change in deformation mode with temperature from brittle fracture to plastic deformation accounts for the differences in wear.

Keywords

Polymer Silicon Scanning Electron Microscopy Zirconia Brittle 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. 1.
    K. E. Puttick, M. A. Shahid and M. M. Hosseni, J. Phys. D 12 (1979) 875.CrossRefGoogle Scholar
  2. 2.
    C. Scott, MS Thesis, University of Illinois at Chicago (1987).Google Scholar
  3. 3.
    R. E. Cuthrell, J. Mater. Sci. 20 (1985) 4084.CrossRefGoogle Scholar
  4. 4.
    T. S. Kuan, K. K. Shih, J. A. Vechten and W. A. Westdrop, J. Electrochem. Soc. 127 (1980) 1387.CrossRefGoogle Scholar
  5. 5.
    S. W. Lee, PhD Thesis University of Illinois at Chicago (1986).Google Scholar
  6. 6.
    S. Danyluk and S. W. Lee, J. Appl. Phys. 64 (1988) 4075.CrossRefGoogle Scholar
  7. 7.
    R. S. Gates, S. M. Hsu and E. E. Klaus, “Ceramic Tribology: Methodology and Mechanisms of Alumina Wear”, NIST Special Publication 758 (National Institute of Standards and Technology, Washington, DC, 1988) p. 42.Google Scholar
  8. 8.
    G. M. Hamilton, J. Mater. Sci. 22 (1987) 989.CrossRefGoogle Scholar
  9. 9.
    S. Jahanmir and N. P. Suh, Wear. 44 (1977) 17.CrossRefGoogle Scholar
  10. 10.
    J. J. Wortman and R. A. Evans, J. Appl. Phys. 36 (1965) 153.CrossRefGoogle Scholar
  11. 11.
    J. L. Dement, J. C. Desyer, J. Rabier and P. Veyssiere, Script. Met. 18 (1984) 41.CrossRefGoogle Scholar
  12. 12.
    S. G. Roberts, P. Pirouz and P. B. Hirsch, J. Mater. Sci. 20 (1985) 1739.CrossRefGoogle Scholar

Copyright information

© Chapman and Hall Ltd. 1991

Authors and Affiliations

  • D. -S. Park
    • 1
  • S. Danyluk
    • 1
  • M. J. McNallan
    • 1
  1. 1.Department of Civil Engineering, Mechanics and MetallurgyUniversity of Illinois at ChicagoChicagoUSA

Personalised recommendations