Journal of Materials Science

, Volume 26, Issue 16, pp 4541–4544 | Cite as

Kinetics of α- and β-Si3N4 formation from oxide-free high-purity Si powder

  • A. Varma
  • R. G. Pigeon
  • A. E. Miller


Available kinetic data for the nitridation of high-purity oxide-free Si powder are analysed. The analysis suggests that the α- and β-phases of Si3N4 are formed by separate and parallel reaction paths, and kinetic expressions for their formation are reported. The formation of the α-phase follows first-order kinetics, while the β-phase is formed by a phase-boundary-controlled rate law. These conclusions are consistent with other kinetic and micrographic analyses reported in the literature.


Polymer Kinetic Data Reaction Path Parallel Reaction Kinetic Expression 
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Copyright information

© Chapman & Hall 1991

Authors and Affiliations

  • A. Varma
    • 1
  • R. G. Pigeon
    • 1
  • A. E. Miller
    • 2
  1. 1.Department of Chemical EngineeringUniversity of Notre DameNotre DameUSA
  2. 2.Department of Electrical EngineeringUniversity of Notre DameNotre DameUSA

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