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Journal of Materials Science

, Volume 26, Issue 16, pp 4261–4267 | Cite as

Plasma deposited thin films suitable as moisture sensors

  • R. K. Sadhir
  • Z. N. Sanjana
Papers

Abstract

Plasma polymerized thin films from a mixture of hexamethyldisiloxane (HMDSO) and ammonia (NH3) deposited directly onto a microdielectrometer chip have been evaluated as moisture sensors. Microdielectrometry was chosen as the measuring technique because of its fast response and real time detection capability. The sheet resistance of the plasma polymerized film was found to decrease by eight orders of magnitude with an increase in relative humidity from 0 to 92%. The moisture effect on the sheet resistance was also found to be reversible. The composition and structure of the films deposited from various mixtures of HMDSO/NH3 have been elucidated by Electron Spectroscopy for Chemical Analysis (ESCA) and infrared spectroscopy.

Keywords

Polymer Spectroscopy Ammonia Thin Film Chemical Analysis 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

  1. 1.
    H. K. Yasuda, in “Contemporary Topics in Polymer Science”, Vol. 3, edited by M. Chen (Plenum, 1979) p. 103.Google Scholar
  2. 2.
    J. Sakato, M. Yamamoto and M. Hirai, J. Appl. Polym. Sci 31 (1986) 1999.CrossRefGoogle Scholar
  3. 3.
    B. V. Tkachuk, V. V. Bushin, V. M. Kolotyrkin and N. P. Smetankia, Vysokomol Soyed. A9(9) (1967) 2018.Google Scholar
  4. 4.
    F. Denes, C. Ungurenasu and I. Haiduc, Eur. Polym. J. 6 (1970) 1155.CrossRefGoogle Scholar
  5. 5.
    N. Inagaki and K. Ohishi, J. Polym. Sci 23 (1985) 1445.Google Scholar
  6. 6.
    N. Inagaki, K. Suzuki and K. Nejigaki, J. Polym. Sci., Polym. Lett. 21 (1983) 353.CrossRefGoogle Scholar
  7. 7.
    R. K. Sadhir, H. E. Saunders and W. J. James, in “Polymers in Electronics”, edited by T. Davidson (American Chemical Society, Washington, DC, 1984) p. 555.CrossRefGoogle Scholar
  8. 8.
    S. D. Senturia, N. F. Sheppard, H. L. Lee and S. B. Marshall, SAMPE 19 (1983) 22.Google Scholar
  9. 9.
    C. H. Lin and S. D. Senturia, Sensors and Actuators 4 (1983) 497.CrossRefGoogle Scholar

Copyright information

© Chapman & Hall 1991

Authors and Affiliations

  • R. K. Sadhir
    • 1
  • Z. N. Sanjana
    • 1
  1. 1.Westinghouse Research and Development CenterPittsburghUSA

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