Journal of Materials Science

, Volume 26, Issue 7, pp 1861–1866 | Cite as

Laser-induced deposition of thin chromium oxide films

  • E. Jacobsohn
  • J. Zahavi
  • A. Rosen
  • S. Nadiv


Molybdenum, 1045 carbon steel and silicon specimens have been coated with thin layers of Cr2O3 by means of ArF excimer pulse laser decomposition of Cr(CO)6 gas. The results of the study revealed that the properties of the films, such as composition, thickness, morphology and microstructure depend on both the parameters of the laser radiation and the physical properties of the substrates.


Oxide Radiation Polymer Silicon Microstructure 
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Copyright information

© Chapman and Hall Ltd 1991

Authors and Affiliations

  • E. Jacobsohn
    • 1
  • J. Zahavi
    • 2
  • A. Rosen
    • 1
  • S. Nadiv
    • 1
  1. 1.Department of Materials EngineeringTechnion, I.I.T.HaifaIsrael
  2. 2.Israel Institute of MetalsTechnion, I.I.T.HaifaIsrael

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