Journal of Materials Science

, Volume 31, Issue 3, pp 603–606 | Cite as

Surface morphology of polycrystalline diamond films etched by Ar+ beam bombardment

  • Hidetoshi Saitoh
  • Takunori Kyuno
  • Ichiro Hosoda
  • Ryoichi Urao


Polycrystalline diamond films etched by Ar+ beam bombardment were investigated by scanning electron microscopy and Raman spectroscopy. In an ion sputtering apparatus, an etching rate of 14 μm C−1 was obtained when 10 kV-accelerated Ar+ ions penetrated with an angle of 15–30° from the normal. A number of cavities were created on the surface treated at low incidence angle. In contrast, micro-prominence was seen under the condition of high incidence angle. The degree of surface roughness on etched films was also changed with the incidence angle of the beam. A relatively smooth surface appeared after the treatment with an incidence angle of ⩾ 15°. Raman spectroscopy revealed that the physical etching of diamond is effective in obtaining high quality surface of polycrystalline diamond films.


Polymer Microscopy Electron Microscopy Scanning Electron Microscopy Surface Roughness 
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Copyright information

© Chapman & Hall 1996

Authors and Affiliations

  • Hidetoshi Saitoh
    • 1
  • Takunori Kyuno
    • 1
  • Ichiro Hosoda
    • 1
  • Ryoichi Urao
    • 1
  1. 1.Faculty of EngineeringIbaraki UniversityIbarakiJapan

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