Surface morphology of polycrystalline diamond films etched by Ar+ beam bombardment
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Polycrystalline diamond films etched by Ar+ beam bombardment were investigated by scanning electron microscopy and Raman spectroscopy. In an ion sputtering apparatus, an etching rate of 14 μm C−1 was obtained when 10 kV-accelerated Ar+ ions penetrated with an angle of 15–30° from the normal. A number of cavities were created on the surface treated at low incidence angle. In contrast, micro-prominence was seen under the condition of high incidence angle. The degree of surface roughness on etched films was also changed with the incidence angle of the beam. A relatively smooth surface appeared after the treatment with an incidence angle of ⩾ 15°. Raman spectroscopy revealed that the physical etching of diamond is effective in obtaining high quality surface of polycrystalline diamond films.
KeywordsPolymer Microscopy Electron Microscopy Scanning Electron Microscopy Surface Roughness
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