Journal of Materials Science

, Volume 30, Issue 22, pp 5639–5643 | Cite as

Preparation of PbTiO3 thin films using an alkoxide-alkanolamine sol-gel system

  • Seung Hyun Kim
  • Chang Eun Kim
  • Young Jei Oh


The stable range of PbTiO3 sol and the processing conditions of uniform thin films were investigated using a solution of titanium isopropoxide, three kinds of alkanolamines (monoethanolamine, diethanolamine, triethanolamine), lead acetate trihydrate and isopropanol. Depending on the sol state with various alkanolamine/alkoxide molar ratios, diethanolamine (DEA) was very effective in preparing uniform and dense oxide films through room-temperature reaction, owing to its superior stability during the hydrolysis and condensation reaction. Perovskite PbTiO3 thin films were obtained on oxidized silicon wafer above 550 °C and completely pure films were obtained at 650 °C using DEA as a complexing agent. The dielectric constant and loss tangent of these thin films fired at 650 °C for 30 min were found to be ∼240 and ∼0.01 at 1 kHz, respectively.


Perovskite Silicon Wafer Triethanolamine Isopropoxide Trihydrate 
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Copyright information

© Chapman & Hall 1995

Authors and Affiliations

  • Seung Hyun Kim
    • 1
  • Chang Eun Kim
    • 1
  • Young Jei Oh
    • 2
  1. 1.Department of Ceramic EngineeringYonSei UniversitySeoulKorea
  2. 2.Division of CeramicsKorea Institute of Science and TechnologyCheongryang, SeoulKorea

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