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Journal of Materials Science

, Volume 29, Issue 12, pp 3372–3375 | Cite as

Erratum to: Effect of deposition temperature on dielectric properties of PECVD Ta2O5 thin film

  • Hwan Seong Moon
  • Jae Suk Lee
  • Sung Wook Han
  • Jong Wan Park
  • Jae Hak Lee
  • Seung Kee Yang
  • Hyung Ho Park
Erratum

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Copyright information

© Chapman & Hall 1994

Authors and Affiliations

  • Hwan Seong Moon
    • 1
  • Jae Suk Lee
    • 1
  • Sung Wook Han
    • 1
  • Jong Wan Park
    • 1
  • Jae Hak Lee
    • 2
  • Seung Kee Yang
    • 2
  • Hyung Ho Park
    • 3
  1. 1.Department of Metallurgical EngineeringHanyang UniversitySeoulKorea
  2. 2.Samsung Advanced Institute of TechnologyKorea
  3. 3.Electronics and Telecommunications Research InstituteKorea

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