Conversion mechanism of perhydropolysilazane into silicon nitride-based ceramics
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The pyrolysis of perhydropolysilazane in anhydrous ammonia has been studied up to 1000 °C through the analysis of the gas phase and the characterization of the solid residue by thermogravimetric analysis, Fourier transform-infrared analysis. X-ray photoelectron spectroscopy, X-ray diffraction and 29Si cross-polarization magic angle spinning-nuclear magnetic resonance. The pyrolysis mechanism involves three main steps: (1) below 400 °C, evaporation of residual solvent; (2) from 400–600 °C, reaction with ammonia leading to an increase of nitrogen content and formation of preceramic polymer-ceramics intermediate solid with a three-dimensional network; (3) from 600–1000 °C, completion of the formation of an amorphous hydrogenated solid with composition close to silicon nitride.
KeywordsSilicon Ammonia Evaporation Pyrolysis Nitride
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