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Journal of Materials Science

, Volume 29, Issue 18, pp 4883–4888 | Cite as

Conversion mechanism of perhydropolysilazane into silicon nitride-based ceramics

  • O. Funayama
  • Y. Tashiro
  • A. Kamo
  • M. Okumura
  • T. Isoda
Papers

Abstract

The pyrolysis of perhydropolysilazane in anhydrous ammonia has been studied up to 1000 °C through the analysis of the gas phase and the characterization of the solid residue by thermogravimetric analysis, Fourier transform-infrared analysis. X-ray photoelectron spectroscopy, X-ray diffraction and 29Si cross-polarization magic angle spinning-nuclear magnetic resonance. The pyrolysis mechanism involves three main steps: (1) below 400 °C, evaporation of residual solvent; (2) from 400–600 °C, reaction with ammonia leading to an increase of nitrogen content and formation of preceramic polymer-ceramics intermediate solid with a three-dimensional network; (3) from 600–1000 °C, completion of the formation of an amorphous hydrogenated solid with composition close to silicon nitride.

Keywords

Silicon Ammonia Evaporation Pyrolysis Nitride 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Chapman & Hall 1994

Authors and Affiliations

  • O. Funayama
    • 1
  • Y. Tashiro
    • 1
  • A. Kamo
    • 1
  • M. Okumura
    • 1
  • T. Isoda
    • 1
  1. 1.Corporate Research and Development LaboratoryTonen CorporationSaitamaJapan

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