Journal of Materials Science

, Volume 29, Issue 18, pp 4683–4685 | Cite as

The dependence of diamond growth rate on hydrogen dissociation in a d.c. arcjet plasma

  • D. A. Russell
  • P. Taborek


A calorimetric technique was used to measure the plasma enthalpy in a d.c. arcjet diamond deposition system. Using these measurements, and a model based on the assumption of local thermal equilibrium (LTE), the temperature of the plasma emerging from the torch nozzle could be calculated. By controlling the electrical power into the torch, the plasma temperature could be varied from 2900 to 4500 K. This range of plasma temperatures corresponded to a fraction of dissociated H2 (α) which ranged from 0.19 to 0.98. Surprisingly, this variation in the concentration of atomic hydrogen had no effect on the diamond growth rate.


Hydrogen Polymer Growth Rate Enthalpy Atomic Hydrogen 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


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  1. 1.
    J. C. Angus, H. A. Will and W. S. Stanko, J. Appl. Phys. 39 (1968) 2915.CrossRefGoogle Scholar
  2. 2.
    D. J. Poferl, N. C. Gardner and J. C. Angus, J. Appl. Phys. 44 (1973) 1428.CrossRefGoogle Scholar
  3. 3.
    R. Messier, A. R. Badzian, T. Badzian, K. E. Spear, P. Bachmann and R. Roy, Thin Solid Films 153 (1987) 1.CrossRefGoogle Scholar
  4. 4.
    D. V. Fedoseev, V. P. Varnin and B. V. Deryagin, Russ. Chem. Rev. 53 (1984) 435.CrossRefGoogle Scholar
  5. 5.
    B. V. Spitsyn and L. L. Bouilov, in “Extended abstracts, diamond and diamondlike materials synthesis”, edited by G. H. Johnson, A. R. Badzian and M. W. Geis (Materials Research Society, Pittsburgh, PA, 1988), p. 3.Google Scholar
  6. 6.
    B. V. Spitsyn, L. L. Bouilov and B. V. Derjaguin, J. Cryst. Growth 52 (1981) 219.CrossRefGoogle Scholar
  7. 7.
    S. J. Harris, Appl. Phys. Lett. 56 (1990) 2298.CrossRefGoogle Scholar
  8. 8.
    M. Frenklach and K. E. Spear, J. Mater. Res. 3 (1988) 133.CrossRefGoogle Scholar
  9. 9.
    M. Frenklach and H. Wang, Phys. Rev. B 43 (1991) 1520.CrossRefGoogle Scholar
  10. 10.
    D. G. Goodwin, Appl. Phys. Lett. 59 (1991) 277.CrossRefGoogle Scholar
  11. 11.
    P. Deák, J. Giber and H. Oechsner, Surface Sci. 250 (1991) 287.CrossRefGoogle Scholar
  12. 12.
    D. G. Goodwin and G. G. Gavillet, J. Appl Phys. 68 (1990) 6393.CrossRefGoogle Scholar
  13. 13.
    D. G. Goodwin, J. Appl. Phys. 74 (1993) 6888.CrossRefGoogle Scholar
  14. 14.
    M. Frenklach, J. Appl. Phys. 65 (1989) 5142.CrossRefGoogle Scholar
  15. 15.
    J. Harris and A. M. Weiner, J. Appl. Phys. 67 (1990) 6520.CrossRefGoogle Scholar
  16. 16.
    F. G. Celii and J. E. Butler, Appl. Phys. Lett. 54 (1989) 1031.CrossRefGoogle Scholar
  17. 17.
    L. Schäfer and C. P. Klages, Appl. Phys. Lett. 58 (1991) 571.CrossRefGoogle Scholar
  18. 18.
    J. A. Mucha, D. L. Flamm and D. E. Ibbotson, J. Appl. Phys. 65 (1989) 3448.CrossRefGoogle Scholar
  19. 19.
    B. L. Preppernau and T. A. Miller, J. Vac. Sci. Technol. A 8 (1990) 1673.CrossRefGoogle Scholar
  20. 20.
    E. Pfender, M. Boulos and P. Fauchis, in “Plasma technology in metallurgical processing” (Iron and Steel Society, Inc., Warrendale, PA, 1987).Google Scholar
  21. 21.
    V. Dembovsky, “Plasma metallurgy: the principles” (Elsevier, New York, NY, 1985).Google Scholar
  22. 22.
    L. D. Landau and E. M. Lifshitz, “Fluid mechanics” (Pergamon Press, Elmsford, NY, 1987).Google Scholar
  23. 23.
    L. D. Landau and E. M. Lifshitz, “Statistical physics” (Pergamon Press, Elmsford, NY, 1980).Google Scholar
  24. 24.
    D. A. Russell and P. Taborek, in “Diamond optics IV, Proc. SPIE 1534”, edited by Albert Feldman and Sandor Holly (SPIE, Bellingham, WA, 1991) p. 14.Google Scholar
  25. 25.
    Y. F. Zhang, D. Dunn-Rankin and P. Taborek, J. Appl Phys. 74 (1993) 6941.CrossRefGoogle Scholar

Copyright information

© Chapman & Hall 1994

Authors and Affiliations

  • D. A. Russell
    • 1
  • P. Taborek
    • 1
  1. 1.Department of PhysicsUniversity of California, IrvineIrvineUSA

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