Pressure pulsed chemical vapour infiltration of SiC to two-dimensional-Tyranno/SiC-C preforms
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Preforms of two-dimensional Tyranno fibre (SiC base) of 7×20×1.3 mm3 were chemically vapour infiltrated with SiC at 850–1050 °C from a gas mixture of CH3SiCl3 (6%)-H2 using pressure pulses between below 0.3 kPa and 0.1 MPa. Above 900 °C, films grew on the macrosurface dominantly. At 850 °C, residual porosity decreased to about 10% after 105 pulses, and three point flexural strength reached about 200 MPa. X-ray diffractograms (XRDs) on the surface showed the deposits to be β-SiC only.
KeywordsPolymer Porosity Chemical Vapour Material Processing Pressure Pulse
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- 1.R. Fedou, F. Langlais and R. Naslain, in “Proceedings of the 11th International Conference on CVD”, Eds. K. E. Spear and G. W. Cullen (Electrochemical Society, NJ, 1990) p. 513.Google Scholar
- 2.Idem., J. Mater. Synth. Process 1 (1993) 61.Google Scholar
- 4.Y. G. Roman, D. P. Stinton and T. M. Besmann, in “Proceedings of the eighth European Conference on CVD”, Eds. M. L. Hitchman and N. J. Archer, Les editione de physique Paris (1991) C2-689.Google Scholar
- 5.T. M. Besmann, R. A. Lowden, B. W. Sheldon and D. P. Stinton, in “Proceedings of the 11th International Conference on CVD” (Electrochemical Society, NJ, 1990) p. 482.Google Scholar
- 6.T. M. Besmann, R. A. Lowden, D. P. Stinton and T. L. Starr, J. Physique, Colloque C5 5 (1989) C5–229.Google Scholar