Journal of Materials Science

, Volume 30, Issue 20, pp 5125–5129 | Cite as

Pressure pulsed chemical vapour infiltration of SiC to two-dimensional-Tyranno/SiC-C preforms

  • Kohzo Sygiyama
  • Kazutoshi Yoshida


Preforms of two-dimensional Tyranno fibre (SiC base) of 7×20×1.3 mm3 were chemically vapour infiltrated with SiC at 850–1050 °C from a gas mixture of CH3SiCl3 (6%)-H2 using pressure pulses between below 0.3 kPa and 0.1 MPa. Above 900 °C, films grew on the macrosurface dominantly. At 850 °C, residual porosity decreased to about 10% after 105 pulses, and three point flexural strength reached about 200 MPa. X-ray diffractograms (XRDs) on the surface showed the deposits to be β-SiC only.


Polymer Porosity Chemical Vapour Material Processing Pressure Pulse 
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Copyright information

© Chapman & Hall 1995

Authors and Affiliations

  • Kohzo Sygiyama
    • 1
  • Kazutoshi Yoshida
    • 1
  1. 1.Department of Applied ChemistryAichi Institute of TechnologyToyodaJapan

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