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Journal of Materials Science

, Volume 29, Issue 15, pp 4099–4103 | Cite as

Preparation of transparent, electrically conducting ZnO film from zinc acetate and alkoxide

  • Y. Ohya
  • H. Saiki
  • Y. Takahashi
Papers

Abstract

Very uniform and transparent zinc oxide thin films doped with aluminium and indium were fabricated by the dip-coating technique using solutions prepared by the ethanolamine method. As starting materials, zinc acetate and zinc n-propoxide were used. Zinc acetate and propoxide are soluble in PriOH in the presence of diethanolamine, although they are hardly soluble without the amine. The prepared solutions were very stable and suitable for dip-coating. Zinc oxide was crystallized by heating above 500 °C, and doping of aluminium and indium retarded the crystallization. The electrical resistivity of the film was decreased by doping with aluminium and indium. The lowest resistivity of 2 × 10−2 Ωcm was obtained by post-coating treatment in a nitrogen atmosphere.

Keywords

Zinc Indium Crystallization Electrical Resistivity Nitrogen Atmosphere 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

  1. 1.
    F. C. M. Van De Pol, Ceram. Bull. 69 (1990) 1959.Google Scholar
  2. 2.
    S. Pizzini, N. Butta, D. Narducci and M. Palladino, J. Electrochem. Soc. 136 (1989) 1945.CrossRefGoogle Scholar
  3. 3.
    Z.-C. Jin, I. Hamberg, C. G. Granqvist, B. E. Sernelius and K.-F. Berggrn, Thin Solid Films 164 (1988) 381.CrossRefGoogle Scholar
  4. 4.
    Y. Takahashi and Y. Matsuoka, J. Mater. Sci. 23 (1988) 2259.CrossRefGoogle Scholar
  5. 5.
    Y. Takahashi and K. Yamaguchi, ibid. 25 (1990) 3950.CrossRefGoogle Scholar
  6. 6.
    Y. Takahashi, Y. Matsuoka, K. Yamaguchi, M. Masaki and K. Kobayashi, ibid. 25 (1990) 3960.CrossRefGoogle Scholar
  7. 7.
    Y. Takahashi and Y. Wada, J. Electrochem. Soc. 137 (1990) 267.CrossRefGoogle Scholar
  8. 8.
    Y. Takahashi and H. Naganawa, Yogyo-Kyokai-Shi (J. Ceram. Soc. Jpn.) 95 (1987) 1107.CrossRefGoogle Scholar
  9. 9.
    Y. Takahashi, Y. Ohchi and T. Sasaki, in “High Performance Ceramics Films and Coatings” (Elsevier Science, Amsterdam, 1991) p. 127.Google Scholar
  10. 10.
    Y. Takahashi, H. Hayashi and Y. Ohya, in “Proceedings of MRS Spring Meeting”, 1992, in press.Google Scholar
  11. 11.
    A. N. Winchell and H. Winchell, “The Microscopical Characters of Artificial Inorganic Solid Substances: Optical Properties of Artificial Minerals” (Academic Press, New York, London, 1964) p. 58.Google Scholar
  12. 12.
    T. Minami, H. Sato, H. Nanto and S. Takata, Jpn. J. Appl. Phys. 24 (1985) L781.CrossRefGoogle Scholar
  13. 13.
    K. Hauffe and A. L. Vierk, Z. Phys. Chem. 196 (1950) 160.Google Scholar
  14. 14.
    C. X. Qiu and I. Shih, Solar Energy Mater. 13 (1986) 75.CrossRefGoogle Scholar
  15. 15.
    B. H. Choi, H. B. Im and J. S. Song, J. Am. Ceram. Soc. 73 (1950) 1347.CrossRefGoogle Scholar
  16. 16.
    S. Ghosh, A. Sarkar, S. Chaudhuri and A. K. Pal, Thin Solid Films 205 (1991) 64.CrossRefGoogle Scholar
  17. 17.
    T. Minami, H. Nanto and S. Tanaka, Jpn J. Appl. Phys. 23 (1984) L280.CrossRefGoogle Scholar

Copyright information

© Chapman & Hall 1994

Authors and Affiliations

  • Y. Ohya
    • 1
  • H. Saiki
    • 1
  • Y. Takahashi
    • 1
  1. 1.Faculty of EngineeringGifu UniversityGifuJapan

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