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Journal of Materials Science

, Volume 29, Issue 13, pp 3510–3516 | Cite as

Electrostatic charge distribution in the dielectric layer of alumina electrostatic chuck

  • T. Watanabe
  • T. Kitabayashi
  • C. Nakayama
Article

Abstract

Electrostatic charge and its distribution in the dielectric layer of TiO2- and Cr2O3-added alumina electrostatic chucks has been studied. The electrostatic potential was evaluated at various applied voltages by an electrostatic potential meter and it demonstrated the existence of charges with opposite polarities. Direct SEM observation and toner development of the charged ceramic surface was carried out to clarify the charge distribution. The charge contrast was not uniform on the ceramic microstructure and the charge was distributed in the form of grains. Taking into consideration these results, the relationship between electrostatic charge distribution and ceramic microstructure is discussed.

Keywords

Polymer Alumina Microstructure TiO2 Applied Voltage 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Chapman & Hall 1994

Authors and Affiliations

  • T. Watanabe
    • 1
  • T. Kitabayashi
    • 1
  • C. Nakayama
    • 1
  1. 1.R and D DivisionT Ltd.KanagawaJapan

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