Synthesis of silicon oxynitride from a polymeric precursor
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In this final part of our investigation, the copolymers prepared (reported in Part III) have been pyrolysed to yield silicon oxynitride. Thermogravimetric studies performed on several copolymers in nitrogen, ammonia/nitrogen mixtures, air and oxygen are discussed in the present paper. One copolymer was used for further investigation and its pyrolysis conditions (variation of pyrolysis atmosphere according to temperature) were optimized to produce the maximum yield of white amorphous residue which was crystallized by heating to 1600°C to produce silicon oxynitride powder. The powder particles were equiaxed in shape and in the size range 50–150 nm but in agglomerates of size 0.3–0.1 μm. Crystallization at higher temperatures resulted in a mixture of a silicon nitride-silicon oxynitride.
KeywordsOxygen Nitrogen Polymer Silicon Atmosphere
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