Journal of Materials Science

, Volume 29, Issue 21, pp 5593–5598 | Cite as

Growth parameter effect in superconducting YBa2Cu4O8 thin films by d.c. magnetron sputtering

  • S. C. Wu
  • H. T. Hsu
  • F. H. Chen
  • W. R. Chang
  • T. Y. Tseng


High- Tc YBa2Cu4O8 (124) thin films have been made by d.c. magnetron sputtering deposition on (100) MgO substrates. The effect of several processing variables, including the ratio of oxygen to argon, total pressure, and substrate temperature, on the superconducting properties of the thin films, were systematically investigated. The as-prepared films annealed in flowing oxygen at 800°C for 4 h under ambient pressure obtained nearly phase-pure 124 and exhibited superconducting onset transition at 75 K.


Oxygen Polymer Thin Film Argon Substrate Temperature 
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Copyright information

© Chapman & Hall 1994

Authors and Affiliations

  • S. C. Wu
    • 1
  • H. T. Hsu
    • 1
  • F. H. Chen
    • 1
  • W. R. Chang
    • 1
  • T. Y. Tseng
    • 1
  1. 1.Department of Electronics Engineering and Institute of ElectronicsNational Chiao-Tung UniversityHsinchuTaiwan

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