Journal of Materials Science

, Volume 29, Issue 21, pp 5569–5575 | Cite as

Synthesis of silicon oxynitride from a polymeric precursor

Part III Polymerization and copolymerization of methylcyclosiloxanes and methylcyclosilazanes
  • Ga -Er Yu
  • J. Parrick
  • M. Edirisinghe
  • D. Finch
  • B. Ralph


In the present work, homopolymerization and copolymerization of methylcyclosiloxanes and methylcyclosilazanes are investigated. Homopolymers and copolymers produced are characterized using 1H NMR and Fourier transform infrared spectroscopy. It is found that the reactivity of methylcyclosiloxanes is much lower than that of methylcyclosilazanes. The structures of the homopolymers and copolymers produced are discussed and it is suggested that the latter consists of a block structure containing siloxanes and silazanes in which the siloxane units are the smaller.


Polymer Spectroscopy Silicon Fourier Fourier Transform 
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Copyright information

© Chapman & Hall 1994

Authors and Affiliations

  • Ga -Er Yu
    • 1
    • 2
  • J. Parrick
    • 1
  • M. Edirisinghe
    • 2
  • D. Finch
    • 2
  • B. Ralph
    • 2
  1. 1.Departments of ChemistryBrunel UniversityUxbridgeUK
  2. 2.Departments of Materials TechnologyBrunel UniversityUxbridgeUK

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