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Journal of Materials Science

, Volume 30, Issue 13, pp 3539–3542 | Cite as

Optical effects of doped top layers in silicon-on-insulator structures formed by ion implantation

  • Yu Yuehui
  • Lin Chenglu
  • Zou Shichang
Article

Abstract

Arsenic ions were implanted into silicon-on-insulator (SOI) structures at an incident energy of 100 keV to a dose of 2 × 1015 cm−2. Conductive top layers were formed in the SOI structures after annealing at 1200 °C for 20 s. Infrared reflection spectra in the wave number range of 1500–5000 cm−1 were measured and interference fringes, related to free-carrier plasma effects, were observed. By detailed theoretical analysis and computer simulation of infrared reflection spectra, the carrier concentration, the carrier mobility, and the carrier activation efficiency were obtained. The physical interpretation of the results and a critical discussion of the sensitivity of the data, fitted to variation in the parameters, are given.

Keywords

Arsenic Carrier Concentration Carrier Mobility Incident Energy Interference Fringe 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Chapman & Hall 1995

Authors and Affiliations

  • Yu Yuehui
    • 1
  • Lin Chenglu
    • 1
  • Zou Shichang
    • 1
  1. 1.Ion Beam LaboratoryShanghai Institute of Metallurgy Chinese Academy of ScienceShanghaiPeople’s Republic of China

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