Thermodynamic analysis of chemical vapour deposition from methoxysilanes
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Thermodynamic equilibrium calculations for the systems n-methoxysilane, SiH4−n (OCH3)n, n = 1–4, were performed using the STANJAN computer code. The required enthalpy and entropy data for the methoxysilanes were estimated using the MOPAC computer program for semi-empirical molecular orbital calculations. The calculated solid-phase compositions were not sensitive to ± 10% changes in the n-methoxysilane enthalpy and entropy values. For n = 2, 3 or 4, the equilibrium solids were comprised of SiO2 and C. The purest SiO2 was predicted for 2-MEOS at atmospheric pressure, low temperature, and an excess of hydrogen. For all n-methoxysilanes, the solid carbon content increased rapidly at moderate temperatures but did not continue to increase at the highest temperatures.
KeywordsEntropy SiO2 Enthalpy Chemical Vapour Deposition Computer Code
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- 2.P. A. Taylor, Solid State Technol. 32 (1989) 143.Google Scholar
- 3.G. Smolinsky, in “Proceedings of the 10th International Conference on CVD”, edited by G. W. Cullen (The Electrochemical Society, NJ, 1987) p. 490.Google Scholar
- 6.W. C. Reynolds, Department of Mechanical Engineering, Stanford University (1986).Google Scholar
- 7.E. R. Ritter, Villanova University, unpublished.Google Scholar
- 10.S. W. Benson, in “Thermochemical Kinetics” (Wiley, New York, 1976) p. 306.Google Scholar
- 11.“JANAF Thermochemical Tables”, 3rd Edn (American Chemical Society and The American Institute of Physics for the National Bureau of Standards, 1985).Google Scholar
- 12.“Thermodynamic Research Center Thermodynamic Tables: Non-hydrocarbons” (Thermodynamic Research Center, Texas A and M University, 1985).Google Scholar
- 13.K. E. Spear, in “Proceedings of the 7th International Conference on CVD” (1979) pp. 1–16.Google Scholar
- 14.D. Stull, E. Westrum and G. Sinke, in “The Chemical Thermodynamics of Organic Compounds” (Wiley, 1969) p. 422.Google Scholar
- 15.A. I. Kingon, L. J. Lutz, P. Liaw and R. F. Davis, J. Am. Ceram. Soc. 66 (1983) 559.Google Scholar
- 17.R. Waesh, in “The Chemistry of Organic Silicon Compounds”, edited by S. Patai and Z. Rappoport (Wiley, New York, 1989) p. 371.Google Scholar