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High-rate deposition of titanium silicides under high gas flow rate by chemical vapour deposition

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Kawai, C. High-rate deposition of titanium silicides under high gas flow rate by chemical vapour deposition. J Mater Sci Lett 13, 860–862 (1994). https://doi.org/10.1007/BF00273230

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Keywords

  • Polymer
  • Titanium
  • Chemical Vapour Deposition
  • Vapour Deposition
  • Chemical Vapour