Skip to main content
SpringerLink
Log in

On the Integration of SPC and APC: APC Can Be a Convenient Support for SPC

  • Chapter
  • First Online:
Frontiers in Statistical Quality Control 10

Part of the book series: Frontiers in Statistical Quality Control ((FSQC,volume 10))

  • 1656 Accesses

Abstract

This paper is developed from Higashide et al. (Front Stat Qual Control 9:71–84, 2010). Automatic process control (APC) is frequently used in the semiconductor manufacturing process; however, statistical process control (SPC) is also needed to control the APC controller. This is an earlier paradigm on the integration of SPC and APC. Our viewpoint is different from the earlier one as follows:

  1. (a)

    APC reinforces SPC.

  2. (b)

    SPC complements APC.

Through case studies on the semiconductor manufacturing process, the remarks above are discussed. Our proposals for the integration of SPC and APC are as follows:

  1. (a)

    The process rate is used as the control characteristic to control the between-subgroup variation.

  2. (b)

    Principal component analysis is applied to control the within-subgroup variation.

These proposals can lead to developments of the traditional \(\bar{X} - R\) charts.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Log in via an institution
Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 39.99
Price excludes VAT (USA)
  • Available as EPUB and PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 54.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

Similar content being viewed by others

References

  1. Box, G., & Kramer, T. (1992). Statistical process monitoring and feedback adjustment – a discussion. Technometrics,34(3), 251–285.

    Google Scholar 

  2. Capilla, C., Ferrer, A., & Romero, R. (1999). Integration of statistical and engineering process control in a continuous polymerization process. Technometrics,41(1), 14–28.

    Google Scholar 

  3. Gonzales, I., & Sanchez, I. (2008). Principal alarms in multivariate statistical process control. Journal of Quality Technology,40(1), 19–30.

    Google Scholar 

  4. Harris, T. J., & Ross, W. H. (1991). Statistical process control procedures for correlated observations. The Canadian Journal of Chemical Engineering,69, 48–57.

    Google Scholar 

  5. Higashide, M., Nishina, K., Kawamura, H., & Ishii, N. (2010). Statistical process control for semiconductor manufacturing process. Frontiers in Statistical Quality Control,9, 71–84.

    Google Scholar 

  6. Jackson, J. E., & Hearne, F. T. (1973). Relationships among coefficients of vectors used in principal components. Technometrics,15(3), 601–610.

    Google Scholar 

  7. Jackson, J. E., & Mudholkar, G. S. (1979). Control procedures for residuals associated with principal component analysis. Technometrics,21(3), 341–349.

    Google Scholar 

  8. Kawamura, H., Nishina, K., & Higashide, M. (2008a). Discount factors and control characteristics in the semiconductor manufacturing process. Proceedings of the 6th Asian Network Quality Congress 2008, CD. Bangkok: ANQ 2008.

    Google Scholar 

  9. Kawamura, H., Nishina, K., Higashide, M., & Shimazu, K. (2008b). Integrating SPC and APC in semiconductor manufacturing process. Quality,38(3), 99–107 (in Japanese).

    Google Scholar 

  10. MacGregor, J. F. (1988). On-line statistical process control. Chemical Engineering Process,84, 21–31.

    Google Scholar 

  11. MacGregor, J. F., & Harris, T. J. (1990). Exponential weighted moving average control schemes: Properties and enhancement – Discussion. Technometrics,32(1), 23–26.

    Google Scholar 

  12. Montgomery, D. C. (2001). Introduction to statistical quality control (4th ed.). New York: Wiley.

    Google Scholar 

  13. Montgomery, D. C., & Mastrangelo, C. M. (1991). Some statistical process control methods for autocorrelated data. Journal of Quality Control,23(3), 179–204.

    Google Scholar 

  14. Roes, K. B., & Does, R. J. M. M. (1995). Shewhart-type charts in nonstandard situations. Technometrics,37(1), 15–40.

    Google Scholar 

  15. Tsung, F., Shi, J., & Wu, C. F. J. (1999). Joint monitoring of PID-controlled processes. Journal of Quality Control,31(3), 275–285.

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Nagoya Institute of Technology, Gokiso-cho, Showa-ku, Nagoya, 466-8555, Japan

    Ken Nishina & Naru Ishii

  2. Renesas Electronics Co., 1753 Shimonumabe, Nakahara-ku, Kawasaki, 211-8669, Japan

    Masanobu Higashide

  3. Tokyo Science University, 2641 Yamazaki, Noda, 278-8510, Japan

    Hironobu Kawamura

Authors
  1. Ken Nishina
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Masanobu Higashide
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Hironobu Kawamura
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Naru Ishii
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Ken Nishina .

Editor information

Editors and Affiliations

  1. , Inst. Statistik und Ökonometrie, Freie Universität Berlin, Garystr. 21, Berlin, 14195, Berlin, Germany

    Hans-Joachim Lenz

  2. LS für Quantitative Methoden,, insbesondere Statistik, Europa-Universität Viadrina, Grosse Scharrnstr. 59, Frankfurt/Oder, 15230, Brandenburg, Germany

    Wolfgang Schmid

  3. , Inst. Statistik und Ökonometrie, Freie Universität Berlin, Garystr. 21, Berlin, 14195, Berlin, Germany

    Peter-Theodor Wilrich

Rights and permissions

Reprints and permissions

Copyright information

© 2012 Springer-Verlag Berlin Heidelberg

About this chapter

Cite this chapter

Nishina, K., Higashide, M., Kawamura, H., Ishii, N. (2012). On the Integration of SPC and APC: APC Can Be a Convenient Support for SPC. In: Lenz, HJ., Schmid, W., Wilrich, PT. (eds) Frontiers in Statistical Quality Control 10. Frontiers in Statistical Quality Control, vol 10. Physica, Heidelberg. https://doi.org/10.1007/978-3-7908-2846-7_8

Download citation

Publish with us

Policies and ethics

Search

Navigation