Abstract
An autonomous capacitive sensor system for high accuracy and stability position measurement, such as required in high-precision industrial equipment, is presented. The system incorporates a self- alignment function based on a thermal stepping motor and a built-in capacitive reference, to guarantee that the relative position between the sensor electrodes is set to 10±0.1 μm. This is needed to achieve the performance specifications with the capacitive readout. In addition, an electronic zoom-in method is used to reach the 10 pm resolution with minimum power dissipation. Finally, periodic self-calibration of the electronic capacitance readout is realized using a very accurate and stable built-in resistive reference. The performance is evaluated experimentally and with simulations.
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© 2012 Springer-Verlag Berlin Heidelberg
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van de Ven, O.S. et al. (2012). Autonomous Self-aligning and Self-calibrating Capacitive Sensor System. In: Kamel, M., Karray, F., Hagras, H. (eds) Autonomous and Intelligent Systems. AIS 2012. Lecture Notes in Computer Science(), vol 7326. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-31368-4_2
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DOI: https://doi.org/10.1007/978-3-642-31368-4_2
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-642-31367-7
Online ISBN: 978-3-642-31368-4
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