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Computational fluid dynamic (CFD) investigation of thermal uniformity in a thermal cycling based calibration chamber for MEMS

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Abstract

Micro-electrical–mechanical system (MEMS) has become important for many industries such as automotive, home appliance, portable electronics, especially with the emergence of Internet of Things. Volume testing with temperature compensation has been essential in order to provide MEMS based sensors with repeatability, consistency, reliability, and durability, but low cost. Particularly, in the temperature calibration test, temperature uniformity of thermal cycling based calibration chamber becomes more important for obtaining precision sensors, as each sensor is different before the calibration. When sensor samples are loaded into the chamber, we usually open the door of the chamber, then place fixtures into chamber and mount the samples on the fixtures. These operations may affect temperature uniformity in the chamber. In order to study the influencing factors of sample-loading on the temperature uniformity in the chamber during calibration testing, numerical simulation work was conducted first. Temperature field and flow field were simulated in empty chamber, chamber with open door, chamber with samples, and chamber with fixtures, respectively. By simulation, it was found that opening chamber door, sample size and number of fixture layers all have effects on flow field and temperature field. By experimental validation, it was found that the measured temperature value was consistent with the simulated temperature value.

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Acknowledgments

The support of Basic Research (973) from Ministry of Science and Technology of PRC with contract number of 2011CB309504 is highly appreciated.

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Authors and Affiliations

  1. School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan, 430074, China

    Xulong Gui

  2. Research Center of Electronic Manufacturing and Packaging Integration, School of Power and Mechanical Engineering, Wuhan University, Wuhan, 430072, China

    Sheng Liu

  3. School of Energy and Power Engineering, Huazhong University of Science and Technology, Wuhan, 430074, China

    Xulong Gui & Xiaobing Luo

  4. Wuhan FineMEMS Inc., 14 Floor, Building 4, District A4, No. 999 Gaoxin Road, East Lake Hi-tech Development Zone, Wuhan, 430075, China

    Xiaoping Wang

Authors
  1. Xulong Gui
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  2. Xiaobing Luo
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  3. Xiaoping Wang
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  4. Sheng Liu
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Corresponding author

Correspondence to Sheng Liu.

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Gui, X., Luo, X., Wang, X. et al. Computational fluid dynamic (CFD) investigation of thermal uniformity in a thermal cycling based calibration chamber for MEMS. Heat Mass Transfer 51, 1705–1715 (2015). https://doi.org/10.1007/s00231-015-1534-2

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  • DOI: https://doi.org/10.1007/s00231-015-1534-2

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